TY  - BOOK
AU  - Behrisch,Rainer
AU  - Wittmaack,K.
TI  - Sputtering by particle bombardment III: characteristics of sputtered particles, technical applications 
SN  - 3540534288
U1  - 530.412 20
PY  - 1991///
CY  - Berlin
PB  - Springer Verlag
KW  - PulverizaciÃ³n catÃ³dica (MetalizaciÃ³n)
KW  - Armarc
KW  - RadiaciÃ³n
KW  - Efecto sobre los materiales
KW  - SÃ³lidos
KW  - Efecto de la radiaciÃ³n sobre
N1  - Incluye Ã­ndice; Angular, energy, and mass distribution of sputtered particles -- Charged and excited states of sputtered atoms -- Surface and depth analysis based on sputtering -- Desorption of organic molecules form solid and liquid surfaces induced by particle impact
ER  -