Sputtering by particle bombardment III :  characteristics of sputtered particles, technical applications / 
Ed. R. Behrisch, K. Wittmaack. 
 - Berlin :  Springer Verlag,  1991. 
 - 412 páginas :  ilustraciones ;  23 cm. 
<br/><br/> Incluye índice 
<br/><br/>Angular, energy, and mass distribution of sputtered particles -- Charged and excited states of sputtered atoms -- Surface and depth analysis based on sputtering -- Desorption of organic molecules form solid and liquid surfaces induced by particle impact 
<br/><br/><label>ISBN: </label>3540534288 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Pulverización catódica (Metalización)<br/>Radiación--Efecto sobre los materiales<br/>Sólidos--Efecto de la radiación sobre
<br/><br/><label>Dewey Class. No.: </label>530.412  / S772s