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Thin film deposition : principles and practice / Donald L. Smith.
Material type:
TextLanguage: English Publication details: Boston : McGraw-Hill, c1995.Description: xxiii, 616 páginas : ilustraciones ; 24 cmISBN: - 9780070585027
- 621.38152 S642t 22
Partial contents:
Thin film technology -- Gas kinetics -- Vacuum tecnhology -- Evaporation -- Deposition -- Epitaxy -- Chemical vapor deposition -- Energy beams -- Glow discharge plasmas -- Film analysis.
Libro
| Item type | Home library | Collection | Call number | Copy number | Status | Barcode | |
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Libro
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Valle/Astin | General | 621.38152 S642t (Browse shelf(Opens below)) | Ej. 1 | Available | 769230002915 |
Incluye referencias bibliográficas e índices
Thin film technology -- Gas kinetics -- Vacuum tecnhology -- Evaporation -- Deposition -- Epitaxy -- Chemical vapor deposition -- Energy beams -- Glow discharge plasmas -- Film analysis.
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